Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies

Hdl Handle:
http://hdl.handle.net/10149/99884
Title:
Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies
Authors:
Schöning, M. J. (Michael); Näther, N. (Niko); Auger, V. (Vincent); Poghossian, A. (Arshak); Koudelka-Hep, M. (Milena)
Affiliation:
University of Neuchâtel. Institute of Microtechnology. Switzerland.
Citation:
Schöning, M. J. et. al. (2005) 'Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies', Sensors and Actuators B: Chemical, 108 (1-2), pp.986-992.
Publisher:
Elsevier
Journal:
Sensors and Actuators B: Chemical
Issue Date:
22-Jul-2005
URI:
http://hdl.handle.net/10149/99884
DOI:
10.1016/j.snb.2004.12.029
Abstract:
Eight different miniaturised flow-through cell configurations with integrated capacitive EIS (electrolyte-insulator-semiconductor) structures have been fabricated at wafer level. The EIS structures have been prepared by means of Si technique (electron-beam evaporation, thermal dry oxidation) and serve as pH sensors. The channels for the miniaturised flow-through cell have been manufactured in SU-8 technique (spin-coating, exposure, developing, lift-off). The microcells have diameters of 200-2000 μm and volumes of 0.3-5 μl. The sensitive areas in the channels are ranging from 1.6 to 25 mm2. For the realisation of a biosensor, the enzyme penicillinase has been immobilised into the channels on the EIS sensor chip. The electrochemical characterisation of the sensor set-up has been performed by capacitance/voltage (C/V) and constant capacitance (ConCap) mode, respectively.
Type:
Article
Language:
en
Keywords:
EIS structure; flow-through measurement; microcell; SU-8 technique; Ta 2O5
ISSN:
0925-4005
Rights:
Author can archive post-print (ie final draft post-refereeing). For full details see http://www.sherpa.ac.uk/romeo/ [Accessed 26/05/2010]
Citation Count:
14 [Scopus, 26/05/2010]

Full metadata record

DC FieldValue Language
dc.contributor.authorSchöning, M. J. (Michael)en
dc.contributor.authorNäther, N. (Niko)en
dc.contributor.authorAuger, V. (Vincent)en
dc.contributor.authorPoghossian, A. (Arshak)en
dc.contributor.authorKoudelka-Hep, M. (Milena)en
dc.date.accessioned2010-05-26T15:30:15Z-
dc.date.available2010-05-26T15:30:15Z-
dc.date.issued2005-07-22-
dc.identifier.citationSensors and Actuators B: Chemical; 108(1-2):986-992en
dc.identifier.issn0925-4005-
dc.identifier.doi10.1016/j.snb.2004.12.029-
dc.identifier.urihttp://hdl.handle.net/10149/99884-
dc.description.abstractEight different miniaturised flow-through cell configurations with integrated capacitive EIS (electrolyte-insulator-semiconductor) structures have been fabricated at wafer level. The EIS structures have been prepared by means of Si technique (electron-beam evaporation, thermal dry oxidation) and serve as pH sensors. The channels for the miniaturised flow-through cell have been manufactured in SU-8 technique (spin-coating, exposure, developing, lift-off). The microcells have diameters of 200-2000 μm and volumes of 0.3-5 μl. The sensitive areas in the channels are ranging from 1.6 to 25 mm2. For the realisation of a biosensor, the enzyme penicillinase has been immobilised into the channels on the EIS sensor chip. The electrochemical characterisation of the sensor set-up has been performed by capacitance/voltage (C/V) and constant capacitance (ConCap) mode, respectively.en
dc.language.isoenen
dc.publisherElsevieren
dc.rightsAuthor can archive post-print (ie final draft post-refereeing). For full details see http://www.sherpa.ac.uk/romeo/ [Accessed 26/05/2010]en
dc.subjectEIS structureen
dc.subjectflow-through measurementen
dc.subjectmicrocellen
dc.subjectSU-8 techniqueen
dc.subjectTa 2O5en
dc.titleMiniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologiesen
dc.typeArticleen
dc.contributor.departmentUniversity of Neuchâtel. Institute of Microtechnology. Switzerland.en
dc.identifier.journalSensors and Actuators B: Chemicalen
ref.citationcount14 [Scopus, 26/05/2010]en
or.citation.harvardSchöning, M. J. et. al. (2005) 'Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies', Sensors and Actuators B: Chemical, 108 (1-2), pp.986-992.-
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